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High-k Materials in Multi-Gate FET Devices

High-k Materials in Multi-Gate FET Devices

Hardcover

Series: Science, Technology, and Management

Technology & EngineeringPhysics

ISBN10: 0367639688
ISBN13: 9780367639686
Publisher: CRC Press
Published: Sep 17 2021
Pages: 164
Weight: 0.94
Height: 0.44 Width: 6.14 Depth: 9.21
Language: English
This book focuses on high-k materials for advanced FET devices. It discusses emerging challenges in the engineering and applications and considers issues with associated technologies.

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