Open Daily: 10am - 10pm | Alley door pickup 10am - 7pm 3038 Hennepin Ave Minneapolis, MN
612-822-4611

  • Open Daily: 10am - 10pm
    Alley-side Pickup: 10am - 7pm

    3038 Hennepin Ave Minneapolis, MN
    612-822-4611

Open Daily: 10am - 10pm | Alley-side Pickup: 10am - 7pm
3038 Hennepin Ave Minneapolis, MN
612-822-4611
MEMS Capacitive Accelerometer

MEMS Capacitive Accelerometer

Gomathi, T.
Aranganathan, A.
Megalan Leo, L.

Paperback

General Sociology

ISBN10: 6208498058
ISBN13: 9786208498054
Publisher: LAP Lambert Academic Publishing
Published: Sep 2 2025
Pages: 60
Weight: 0.21
Height: 0.14 Width: 6.00 Depth: 9.00
Language: English
This project presents the design, simulation, and fabrication of a novel MEMS capacitive thin film pressure sensor for accurate and efficient pressure measurements. The proposed sensor utilizes a flexible diaphragm structure, fabricated using advanced thin film deposition techniques, to ensure high sensitivity and wide dynamic range. The capacitive sensing principle, coupled with advanced signal processing techniques, enables precise detection of pressure variations. The sensor's design incorporates a unique diaphragm geometry and electrode arrangement to optimize sensitivity and minimize cross-sensitivity to other environmental factors. Finite element analysis (FEA) simulations were conducted to validate the design and predict sensor performance under various operating conditions.

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General Sociology

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