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Optical Inspection of Microsystems, Second Edition
Hardcover
Technology & EngineeringPhysics
ISBN13: 9781498779470
Publisher: Crc Pr Inc
Published: Jun 25 2019
Pages: 570
Weight: 2.90
Height: 1.30 Width: 7.20 Depth: 10.10
Language: English
This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.
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